CLEANING SYSTEM

CRD-4200 Fully Automatic Casette Box Cleaning System

CRD-4200

Cassette cleaner CRD-4200 is state of the art highly efficient system designed and manufactured by Hugle Electronics Inc.
Who has long history and affluent experience in the high-tech industry.
This super flexible wet cleaning system provides customers with highly pure results.

Product Summary
  • Special “Tray” is designed and fabricated for efficient cleaning of cassettes or boxes for large sizes wafers up to 8 inches.
  • “Tray” is transferred on the unique design conveyer on which our accumulated experience is reflected.
  • The process chambers have wide space which materializes high throughput.
Specification
Capacity Wafer Cassette 8inch
6inch		 24pcs or less/hour
60-36pcs/hour		 576pcs or less/day
1440-864pcs/day
Career BOX
(For one cassette)		 8inch
6inch		 6pcs or less/hour
10-6pcs/hour		 144pcs or less/day
240-144pcs/day
※Cycle Time 6-10min.
Removable
contamination		 Particle (dust) and general Oily materials
(except special chemical oil)
Electro Static
Removal		 Decrease it down to 1kv or less
CDA or Nitrogen
Consumption: 1,600 ℓ/min
Pressure in process 0.5Mpa-0.6Mpa
Connecction: 3/4"pipe (3/4"Swagelok or its compatible fittings) -For Drying
3/8"pipe (1/2"Swagelok or its compatible fittings) -For air operation
DI Water Consumption: Max70 ℓ/cycle
Supply:10ℓ or more/min
Connection:1/2"pipe (1/2"Swagelok or its compatible fittings)
Surfactant Consumption differs by surfactant
Power 200V,　6ｋW,　50/60Hz
Exhaust Required consumption:2.5N㎥/min
When not drying process:25mmAq-580mmAq
Connection:Dia 48mmΦPVC pipe
Drain Connection:Dia 48mmΦPVC pipe
Dimension 2,680 (W) ×1,050 (D) ×1,145 (H) mm (MAIN) 610 (W) ×1,010 (D) ×1,150 (H) mm (BLOWER) 450 (W) ×　750 (D) ×1,150 (H) mm (TANK)
Weight 500 Kｇ

*It is possible to demonstrate.
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