Semiconductor and flat panel production-related machinery / development / production / sale such as the electrostatic removal device / electrostatic measurement machinery / pure water washing device / earthly affairs removal device / semiconductor inspection machinery and the import and export
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CLEANING SYSTEM
UPC-12100 Full Automatic FOUP Cleaning System
In 300mm lines, cassette-box-one-unit FOUP is commonly used on automatic transfer system OHT or RGV and its comprehensive management is a vital issue for product efficiency.
Product Summary
- Super high purity by ultrasonic DIW Jet Wash
- Shell and door with automatic opening and opening and shutting mechanism.
- The operation is possible in both mode (online, offline)
- Quick dry by FOUP Door Spinning
- Result in 300mm mass production line (overseas)
Specification
【Main Unit】
【Tank Unit】
*It is possible to demonstrate.
| Surface finish | SUS 304 # 400 |
| Dimension | 2200 (W) x 2550 (H) x 3250 (D) mm |
| Weight | Less than 3,500kg |
| Power | 3φ 208 V 25 kVA |
【Tank Unit】
| Dimension | 460 (W) x 1200 (H) x 1000 (D) mm |
| Weight | Less than 120kg |
| Power | 3φ 208 V 5 kVA |
*It is possible to demonstrate.
