CLEANING SYSTEM

UPC-12500 Full Automatic FOUP Cleaning System

UPC-12100

As product development and manufacturing with a 300mm-wafer have become industry standard, FOUP cleaning is required for manufacturing of advance products. Regarding with Automatic FOUP cleaning system, we have renewed UPC-12100 which is one of the most reliable and world’s top class business showings. The brand new system is named UPC-12500 and it has been improved our previous machine with a concept of higher through-put, higher quality and energy saving which are indispensable to contemporary Semiconductor production. UPC-12500 was built with based on SEMI standard, UL and CE marking. It is also corresponds to Automated Material Handling System (AMHS) like OHT or RGV and Communication protocol (GEM300), so it is suitable for On-line control.

Product Summary
  • High Throughput
  • Enhanced Maintainability
  • Prevent Cross-Contamination risk
  • Super High Purity Cleaning by 2-fluid Jet Method
  • Complete Drying
  • Energy saving
  • Footprint saving
  • Compliance to various standards (SEMI standard, GEM300, CE marking, UL)
Specification
【Specification】
Dimension 2,200(W) × 3,250(L) × 2,500(H) mm
Weight 3,800 kg
Power 3φ, 200V±10V, 100A
DI Water 15 LPM
1/2"
CDA-1 4,000 LPM, 0.7 ± 0.05 MPa
1"
CDA-2 1,000 LPM, 0.7 ± 0.05 MPa
1/2"
Vacuum 2 LPM, -45 ～ -100 kPa
1/4"
Drain-1 15 LPM
40A
Drain-2 15 LPM
40A
Exhaust-1 2,000 LPM
20A
Exhaust-2 2,500 LPM (2系統)
80A (2 lines)
Drain-pan Drain  
Rc 1/2" (2 lines)

* This Equipment is possible to demonstrate.
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