Semiconductor and flat panel production-related machinery / development / production / sale such as the electrostatic removal device / electrostatic measurement machinery / pure water washing device / earthly affairs removal device / semiconductor inspection machinery and the import and export
 |
 |
 |
 |
CLEANING SYSTEM
UPC-8300 Automatic SMIF POD Cleaner
Semiconductor wafer process is facing its rapid progress as pitch narrows, large size wafers are deployed to the line, and new materials are started being used in mass production.
For efficient investment, Mini Environmental concept is becoming popular and SMIF POD is widely used in 8-inch fabs.
Its clean management is now a critical issue.
Hugle Electronics has been a dominant player in cleaning system for wafer cassette and box.
Through that experience and accumulated injstall base, it developed the industry-only fully automated SMIF POD clean system with Automatic door open-close function.
Many units of this system have been installed in mass production fabs.
Product Summary
- Max 10 PODs can be set in the stocker
- LCD toch-screen can pre-set multiple recipe for process time
- Automated transfer system has automatic latch lock and unlock function
- Enhanced throughput materialized by dual chambers
- Market-proven DI jet water wash method
- Process receipe can be assigned each of max 10 SMIF PODs
Specification
| Dimensions | 2000(W)x2000(D)x2200(H)mm | |
| Weight | 1800kg (Main Unit), 100kg(Tank Unit) | |
| Power | 200V 3ph 25A (Main Unit) | |
| 200V 3ph 12A (Tank Unit) | ||
| DI water | 30ℓ/min(MAX) | |
| Pressure 3kgf / cm2 | ||
| Tubing Diameter 1/2" OD Swagelok | ||
| CAD 1(for Drying) | Pressure | 7 kgf / cm2 |
| Flow Rate | 2.4 m3 / min | |
| Tubing Diameter | 1" OD Swagelok | |
| CAD 2(for Purge) | Pressure | 7 kgf / cm2 |
| Flow Rate | 0.3 m3 / min | |
| Tubing Diameter | 1 / 2" OD Swagelok | |
| CAD 3(for pure water pressurizing) | Pressure | 7 kgf / cm2 |
| Flow Rate | 0.35 m3 / min | |
| Tubing Diameter | 3 / 8" OD Swagelok | |
| Drain-1 | Flow Rate | 15ℓ / min |
| Pipe Diameter | JIS40A Flange(5kg) | |
| Drain-2 | Flow Rate | 15ℓ / min |
| Pipe Diameter | JIS40A Flange(5kg) | |
| Exhaust | Pressure | 100 mmAq |
| Flow Rate | 2.8 m3 / min | |
| Pipe Diameter | JIS 125 A Flange (10 ㎏) | |
| Vacuum | Pressure | - 41 kPa |
| Flow Rate | 1 ℓ / min | |
| Tubing Diameter | 1 / 4" OD Swagelok | |
