Both sides dry cleaner USG-206D for Flat Panel
This USG-206D is the In-line conveyor type cleaner placed USG-206 type cleaning head at Both sides (top & bottom) and mainly used at FPD panel (LCD/PDP) array and cell process.
Summary
- Can remove particles on the panel ( front and back side of it ) at same time on FPD array and
cell process in line.
- Practicable from small size to G10 size panel. ( 100 mm - 3000 mm )
- VPV type cleaning head ( Single pressure slit and double vacuum slits ).
Performance
- 100% removal of particles down to 1.6 μm.
Test condition
| Test machine |
Our test machine in a class 100 clean room. |
| Test panel |
Cr glass for LCD ( 370 mm x 470 mm x 0.7t ) |
| Head pressure |
13 kPa |
| Gap |
1.5 mm |
| Transfer speed |
100, 200 mm/sec. |
| Inspection |
CCD camera |
Cleaning method : ( side view )
- We will install small rollers into the bottom side of head when you use this cleaner for at very thin panel like a FPD panel.
- Small rollers into the bottom side of head are placed at outside of vacuum slot prevent from air turbulence. And this method succeeded high cleaning result.
Flow diagram