Semiconductor and flat panel production-related machinery / development / production / sale such as the electrostatic removal device / electrostatic measurement machinery / pure water washing device / earthly affairs removal device / semiconductor inspection machinery and the import and export
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DRY CLEANER
One side dry cleaner [High pressure type] USG-207 for Flat Panel
This USG-207 is the high pressure type ( more than twice power up as USG-206 ) cleaner for the customer that can’t satisfied the ability of USG-206.
Summary
- By original pressure/vacuum aerodynamic air balance control, particles removed from panel surface can be efficiently sucked to the vacuum slot and prevent from scattering to surroundings.
- Non-contact air method : No damage to the product surface and High-throughput.
- Practicable from 100 to 3000mm (G10) panel size.
- VPV type cleaning head ( Single pressure slit and double vacuum slits ).
Performance
- 100% removal of particles down to 1.6 μm.
| Test machine | Our test machine in a class 100 clean room. |
| Test panel | Cr glass for LCD ( 370 mm x 470 mm x 0.7t ) |
| Head pressure | 13 kPa |
| Gap | 1.5 mm |
| Transfer speed | 100, 200 mm/sec. |
| Inspection | CCD camera |
Effectiveness of using ionized air ( side view )
- Most of particles on the panel can be easily attracted by static electricity.
So use ionizer before and after cleaning has the most effective to cleaning and for protect retract particles.
Be sure pin up the panel when you use ionizer ( see drawing. )
