Semiconductor and flat panel production-related machinery / development / production / sale such as the electrostatic removal device / electrostatic measurement machinery / pure water washing device / earthly affairs removal device / semiconductor inspection machinery and the import and export
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DRY CLEANER
One side dry cleaner [Energy-saving type] USG-401 for Flat Panel
This USG-401 is the one side cleaner that lightweight and minimum space by compact designed cleaning head and low electricity energy-saving type.
Mainly use at FPD and solar panel process.
Summary
- By original pressure/vacuum aerodynamic air balance control, particles removed from panel surface can be efficiently sucked to the vacuum slot and prevent from scattering to surroundings.
- Non-contact air method : No damage to the product surface and High-throughput.
- VPV type cleaning head ( Single pressure slit and double vacuum slits ).
Specifications
- Practicable from small size to G10 size panel. ( 100 mm - 3000 mm )
Performance
- 100% removal of particles down to 1.6 μm.
| Test machine | Our test machine in a class 100 clean room. |
| Test panel | Cr glass for LCD ( 370 mm x 470 mm x 0.7t ) |
| Head pressure | 13 kPa |
| Gap | 1.5 mm |
| Transfer speed | 100, 200mm/sec. |
| Inspection | CCD camera |
